Star Cluster Systems
MODEL PDS-6000 - TEK-VAC INDUSTRIES Inc. (TEK-VAC INDUSTRIES Inc.)
One centrally located robot with four access ports.
Four process chambers, one central loadlock, and one clean room load lock.
Two 330 liter/second turbomolecular pump serving all process chambers.
Options of 104 CFM Roots Blowers each backed by a 27 CFM rotary vane pumps.
