OES Spectrometers
OES Spectrometers (Optical Emission Spectrometers for OEMs) optimized for SEMICON applications including plasma monitoring/end-point detection and reflectometry (with the addition of a flash lamp). The OES-Star features unmatched throughput and SNR, spectral coverage and < 1 nm resolution). Our new OES Family, OES-Star, VS70-MC and InVizU all include our latest “Multi-Communications interface” electronics (MC= EtherCAT, Ethernet, USB-2). The Invizu integrates both a linear CMOS sensor for UV-VIS and a TE-Cooled INGAAS sensor, which extends the spectral coverage to 1700 nm.
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Hyperspectral Imaging Spectrometer
Hyperspectral PoliSpectra® H116 - HORIBA, Ltd.
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Most Compact Vacuum UV Back-Illuminated CCD Spectrometer (VUV-FUV)
VU90 Spectrometer - HORIBA, Ltd.
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UV-VIS-NIR Spectrometer
OES-Star - HORIBA, Ltd.
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Multispectra, Multifiber, Multichannel Imaging spectrometer with 8-16-32 Simultaneous UV-NIR Spectra
PoliSpectra® M116 MultiTrack Spectrometer - HORIBA, Ltd.
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Ultra Compact and Broad Range Spectrometer
InVizU Cube - HORIBA, Ltd.