Plane Mirror Interferometer

The Keysight 10706A Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. The unique contribution of the 10706A is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.

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Single Axis Interferometers

Keysight Technologies

Linear, single-beam, and plane mirror interferometers measure motion on a single axis.

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Angular Interferometer

10770A - Keysight Technologies

The Keysight 10770A Angular Interferometer is a high accuracy plane mirror interferometer ideal for use in precision calibration applications. Used with the 10771A Angular Reflector in an 5530 Laser Calibration System, the interferometer measures pitch and yaw motions along each axis that a machine tool or measuring machine travels. The system can help quickly locate and evaluate unwanted angular motion.

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High-Resolution Interferometer

10716A - Keysight Technologies

The Keysight 10716A High Resolution Interferometer is used for single and multiple axis applications such as precision X-Y stages. The 10716A offers twice the resolution of conventional plane mirror interferometers and has the same excellent thermal stability as the 10706B High Stability Plane Mirror Interferometer. Measurement drift is typically of that exhibited by a conventional plane mirror interferometer. These features result in improved accuracy, repeatability, and thermal stability. However, slew rate is halved.

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Single Beam Interferometer

10705A - Keysight Technologies

The Keysight 10705A Single Beam Interferometer, the smallest linear interferometer, is designed for making low mass or limited space single axis measurements. It is ideal for use in disk drive and other confined space applications. The single beam interferometer is called that because the outgoing and returning beams are superimposed on each other, giving the appearance of only one beam traveling between the interferometer and the retroreflector.

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Linear Interferometer

10702A - Keysight Technologies

The 10702A includes one 10703A Retroreflector as a reference reflector. A second 10703A is needed to complete the linear measurement optic set. The interferometer cannot be used to bend the beam. If the interferometer is the moving component, the 10702A Option 001 must be ordered. More about the 10703A Retroreflector

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High Stability Plane Mirror Interferometer

10706B - Keysight Technologies

The Keysight 10706B High Stability Plane Mirror Interferometer is a dual pass interferometer used for multiple axis applications such as X-Y stages where the measurement mirror may move perpendicular to the measurement axis. This thermally stable optic, an exact functional replacement for the 10706A Plane Mirror Interferometer, reduces thermal measurement drift to 1/12 the value typically achieved by conventional plane mirror interferometers. The unique contribution of the 10706B is its tolerance of angular misalignment of the plane mirror reflector. The 10706A can accept a range of measurement mirror angular alignment changes.

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Linear Interferometer

10766A - Keysight Technologies

The Keysight 10766A Linear Interferometer is used for general purpose single axis measurements and can be employed when the interferometer is the moving component, instead of the measurement reflector. It has a rugged, thermally stable stainless steel housing.

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Plane Mirror Interferometer

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Single Axis Interferometers

Angular Interferometer

High-Resolution Interferometer

Single Beam Interferometer

Linear Interferometer

High Stability Plane Mirror Interferometer

Linear Interferometer