Vapor Mass Flow Controllers

Heated pressure-based mass flow controllers are designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas.

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Mass Flow Controllers & Meters

MKS Instruments

Mass Flow Controllers & Meters

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Mass Flow Controllers

MKS Instruments

Enabling Productivity Through Flow Control Innovation. Our wide range of mass flow controllers are available in thermal and pressure based sensor technologies, analog and digital communication, and metal or elastomer seals.

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High Accuracy In-Situ Mass Flow Verifier

HA-MFV - MKS Instruments

The HA-MFV, High Accuracy Mass Flow Verifier is designed for use on process tools to verify mass flow control flow rates in-situ. Available with EtherCAT® or DeviceNet™ communications and measurement accuracy of 1.0% of reading, the HA-MFV can verify MFC flow with the actual process gas significantly better than older rate-of-rise devices or process chamber rate-of rise methods.

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Flow Ratio Controllers

MKS Instruments

Optimizing process performance just became easier with the DELTA™ Flow Ratio Controller (FRC). Widely used in a variety of flow splitting applications such as etching, stripping, and PECVD, the DELTA™ Flow Ratio Controller (FRC) provides users with the ability to distribute gas or gas mixtures to different zones in a process chamber.

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Vapor Source Mass Flow Controller With Viscous Choked Flow

MKS Instruments

The 1150C Vapor Source Mass Flow Controllers are pressure based measurement and control systems designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas using viscous flow through a choked orifice.

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Vapor Source Mass Flow Controller With Viscous Laminar Flow

MKS Instruments

The 1152C Vapor Source Mass Flow Controller is a pressure-based measurement and control system designed to meter and control vapor from low vapor pressure liquid and solid sources directly, without the need of a carrier gas. The 1152C consists of a fixed flow element and two capacitance manometers for flow measurement, with a proportioning solenoid control valve for flow control.

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Vapor Mass Flow Controllers

Topics

Mass Flow Controllers & Meters

Mass Flow Controllers

High Accuracy In-Situ Mass Flow Verifier

Flow Ratio Controllers

Vapor Source Mass Flow Controller With Viscous Choked Flow

Vapor Source Mass Flow Controller With Viscous Laminar Flow