Multiple Axis Interferometers

Laser Interferometer Position Measurement Systems

When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.

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Beam Directing and Reflecting Optics

Keysight Technologies

Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).

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2-Axis High-Resolution Laser Axis Board for VME

10898D - Keysight Technologies

The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.

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Single Axis Interferometers

Keysight Technologies

Linear, single-beam, and plane mirror interferometers measure motion on a single axis.

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Differential and Compensation Interferometers

Keysight Technologies

One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.

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Laser Heads

Keysight Technologies

The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.

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PC System Electronics

Keysight Technologies

Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.

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Receivers and Sensors

Keysight Technologies

Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.

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VME System Electronics

Keysight Technologies

Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.

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Three Axis Interferometer

10735A - Keysight Technologies

The Keysight 10735A Three Axis Interferometer is used in multiple axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements. The inherent beam parallelism ensures that there is essentially no cosine error between the three measurements and also ensures angle accuracy for pitch and yaw measurements. Other characteristics include:

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Three Axis Interferometer

10736A - Keysight Technologies

The Keysight 10736A Three Axis Interferometer is used in multiple axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements. The inherent beam parallelism ensures that there is essentially no cosine error between the three measurements and also ensures angle accuracy for pitch and yaw measurements. Other characteristics include:

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Two Axis Differential Interferometer

10721A - Keysight Technologies

The Keysight 10721A Two Axis Differential Interferometer, when used in multiple axis applications, simultaneously makes two differential measurements linear and angular (yaw) displacement. Both measurements reference external mirror mounted to an object such as a column or inspection tool. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error. The 10721A is similar to the 10719A Single Axis Differential Interferometer, except that it provides an additional measurement axis.

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Multiple Axis Interferometers

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