Two Axis Differential Interferometer

The Keysight 10721A Two Axis Differential Interferometer, when used in multiple axis applications, simultaneously makes two differential measurements linear and angular (yaw) displacement. Both measurements reference external mirror mounted to an object such as a column or inspection tool. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error. The 10721A is similar to the 10719A Single Axis Differential Interferometer, except that it provides an additional measurement axis.

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Multiple Axis Interferometers

Keysight Technologies

Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.

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Three Axis Interferometer

10735A - Keysight Technologies

The Keysight 10735A Three Axis Interferometer is used in multiple axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements. The inherent beam parallelism ensures that there is essentially no cosine error between the three measurements and also ensures angle accuracy for pitch and yaw measurements. Other characteristics include:

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Three Axis Interferometer

10736A - Keysight Technologies

The Keysight 10736A Three Axis Interferometer is used in multiple axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements. The inherent beam parallelism ensures that there is essentially no cosine error between the three measurements and also ensures angle accuracy for pitch and yaw measurements. Other characteristics include:

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Two Axis Differential Interferometer

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Multiple Axis Interferometers

Three Axis Interferometer

Three Axis Interferometer