Non-contact Measurement Wafer Sorting System (Belt Drive Tranceportation)

*Non-contact measurement of resistivity, thickness and conductivity (P/N)
*Number of cassette station can be changed by customers request
*Eddy current method for resistivity, Electric capacitance method for wafer thickness
*Temperature correction for silicon wafer function

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Topics

Wafer
Measurement
Drives
Systems
Wafer Resistivity
Wafer Thickness
Non-contact Temperature
Eddy Current
Electric Conductivity
Resistivity