OAI
OAI is a leading manufacturer of reliable, precision equipment for MEMS, semiconductors, nanotechnology, cleanroom automation, and for UV light measurement.
- 800-843-8259
408-232-0600 - 408-433-9904
- sales@oainet.com
- 464 South Hillview Drive
Milpitas, CA 95035
United States of America
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Product
Solar Simulators
TriSOL CPV
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Concentrating Photovoltaics (CPV) has the promise of producing solar cells with high cell efficiencies, which result in a reduction in the cost of operating a PV module. However, a CPV system requires the integration of CPV solar cells, modules and CPV optics into one efficient system. OAI’s focus is CPV cell testing methodology. The CPV cells can now be tested using OAI’s advanced standalone CPV Simulators for low dose and high dose configurations. The low dose CPV Solar Simulator provides exposure up to 50 Suns, whereas, the high dose CPV Solar Simulator provides exposure up to 1500 Suns. The low and high dose simulators provide exposure in varying Sun concentrations in various beam sizes from 1.5cm x 1.5cm to 7.5cm x 7.5cm, and may be configured with OAI’s I-V Test Systems.
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Product
Exposure Systems
Model 2000AF & 2000SM
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The OAI Model 2000 Exposure Systems may be configured as either an edge-bead exposure system (2000SM) or a flood exposure system (2000AF); both configurations are based on OAI’s proven, time-tested platform.
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Product
Exposure Systems
Model 2012AF & 2012SM
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The Model 2012AF Flood Exposure System provides a cost-effective method for automated flood exposure. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.The Model 2012SM Automated Edge-bead Exposure System provides a cost-effective method for edge-bead removal using standard shadow mask technology. Designed to accommodate wafers from 8” to 300mm, the tool features automated FOUP loading. Mask and substrate changeover can be accomplished quickly and easily adding to both versatility and high-volume throughput of this production tool.
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Product
Surface & Volume Low Resistivity Meter for Conductive Materials
Loresta GP
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The Loresta GX Meter is an intelligent, multi purpose low resistivity meter equipped with software that calculates resistivity correction factors. A variety of 4 pin probes are available for use with the Loresta GX. The instrument is typically used in Product Engineering, R&D, and Quality Control. Applications include measurement of conductive paint, conductive plastics, conductive rubber, conductive film, silicon wafers, antistatic materials, EMI shield materials, conductive fiber, conductive ceramics, etc.
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Product
Continuous Wave Solar Power Meter
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The OAI Continuous Wave Solar Power Meter is an essential analytical tool for measuring the irradiance (in Suns) of Continuous Wave Solar Simulators. OAI’s Solar Power Meters feature unique features not found in other Solar Meters. This versatile meter can display a wide variety of cell characteristics that include: cell type, window type, cell size, and temperature measurement device type. The OAI Continuous Wave Solar Power Meter can sample and display a continuous reading or peak reading. The Power Meter connects via USB port for data collection, and includes desktop software. With this small, portable, battery-powered meter, numerous production solar simulators can be tested and compared in a short amount of time, leading to greater production line consistency and throughput.
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Product
Tabletop Front & Backside Mask Aligner
Model 200IR
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The OAI Model 200IR Mask Aligner is a tabletop system that requires minimal clean room space. It is a cost-effective alternative for R&D or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The Model 200IR Mask Aligner is capable of one micron resolution and alignment precision. It has an alignment module which features mask insert sets and quick-change wafer chucks that enable the use of a variety of substrates and masks without requiring tools for reconfiguration. The alignment module incorporates micrometers for X, Y, and z-axis.
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Product
UV Light Meter
Model 308T
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Built for high intensity applications the NEW OAI Model 308T UV Light Meter is a dependable, direct-reading instrument designed for measuring UV light intensity for UV curing. The Model 308T features detachable probes for use in the UVA, UVB and UVC ranges, plus a high speed serial port. Accuracy of the meter is within ±3%and measurement repeatability is within ±3 LSB (least significant bit). Like all OAI precision instruments, the Model 308T provides NIST traceable measurements. This easy-to-use meter is auto-ranging from 0.1 to 1999.9 milliwatts/cm2 full scale when used with the 2000 milliwatts/ cm2 probe. The linearity of the meter in this range is at least ±(.002% + 6 LSB).
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Product
Handheld Surface & Volume Low Resistivity Meter for Conductive Materials
Loresta AX
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The Loresta AX Resistivity Meter a handheld unit measures the low resistivity of samples with consistent accuracy. This resistivity meter measures resistivity using a wide variety of probes. The Loresta AX uses a standard RCF that enables the user to input other RCF''s if known.
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Product
Wafer Bonder
AML
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Wafer bonding has found many applications in the field of MST, MEMS and micro engineering. These include the fabrication of pressure sensors, accelerometers, micro-pumps and other fluid handling devices. The process is also used for first-order packaging of silicon microstructures to isolate package-induced stresses. The OAI AML Wafer Bonder facilitates both the alignment and bonding to be performed in-situ, in a high vacuum chamber. For anodic bonding the wafers are loaded cold and heated in the process chamber. For high accuracy alignment the wafers are aligned and brought into contact only after the process temperature has been reached, thus avoiding differential thermal expansion effects which can compromise alignment. The AML Wafer Bonder is excellent for anodic bonding, silicon direct and thermal compression bonding applications. These features enable the bonder to be used with virtually any processing tool.
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Product
TriSOL Class AAA 0.25º Collimation Angle Solar Simulators
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For high performance space applications, OAI offers a 0.25 Collimation Angle Solar Simulator. It is engineered with the technology built on OAI’s 47 years of experience working with light. Features include 100mmx100mm beam size, long lens housing, AM 1.5 G and AMO spectrum up to 1800 nm or any custom spectrum, and intensity controlled up to 1.25 SUNS. These solar simulators are built with OAI’s precision, quality and reliability.
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Product
Tabletop Mask Aligner
Model 200
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The OAI Model 200 Mask Aligner is a cost-effective high performance mask Aligner that has been engineered with industry proven components that have made OAI a leader in the photolithography capital equipment industry. The Model 200 is a tableop mask Aligner that requires minimal cleanroom space. It offers an economic alternative for R&D, or limited scale, pilot production. Utilizing an innovative, air bearing / vacuum chuck leveling system, the substrate is leveled quickly and gently, for parallel photo mask alignment and uniform contact across the wafer during contact exposure. The system is capable of one micron resolution and alignment precision.
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Product
Mask Treatment Process
Model 100MT
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OAI offers a unique process which extends the life of your mask, says good bye to tedious washing and drying of mask and thus enables your mask aligner to have increased productivity at the lowest cost of ownership. The Model 100 MT is a 2 step process.
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Product
TriSOL Large Area Solar Simulators
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OAI has designed and engineered for large area markets Class AAA, ABA, or ACA Solar simulators with the same performance , quality, and reliability as our other solar simulator models. These large area solar simulators are available in several models.
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Product
Stand-alone I-V Test Systems
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OAI offers a complete line of high performance I -V Testers. I -V Testers and I -V Rider software may be ordered as a stand -alone system or integrated into any OAI Solar Simulator. Three standard ranges of I -V Testers are available; ≤1A, 1 -5A, 5 -10A, and 20A. Higher current testers are available as custom options. An OAI Application Engineer will work with you to insure that the I -V Tester and I -V Rider software you choose is optimized for your specific application.
