Surface Profiler Measurement System

SP series - Toray Engineering Co., Ltd.

SP series, high accuracy 3D surface profiler measurement system with white light interferometry.

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Measuring & Analysis Equipment

Toray Engineering Co., Ltd.

Quality management for semiconductor manufacturing processes and liquid crystal panel manufacturing processes, which require nano-order precision. Oxygen analyzers used in firing furnaces and N2 reflow ovens.Water quality meters used to monitor the water quality of plant discharge and the pure water used in semiconductor manufacturing processes.Our measuring and analysis equipment is used in a wide range of fields.

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Wafer Internal Inspection System

INSPECTRA® IR Series - Toray Engineering Co., Ltd.

An infrared internal defect inspection system has been added to the INSPECTRA® series.It is now possible to inspection with both infrared and visual light in one system.

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Wafer Inspection System

INSPECTRA® Series - Toray Engineering Co., Ltd.

INSPECTRA® series meet the requests of 100% automatic inspection with high speed and high specifications from front-end to back-end of semiconductor processing. INSPECTRA® series are wafer inspection systems with high speed and high sensitivity. Our original "Die-to-Statistical-Image" comparison method achieves the target defects detection controlling process variation and overkill.

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Luminescence Defect Inspection System

INSPECTRA® PL Series - Toray Engineering Co., Ltd.

This system uses luminescent images created using photoluminescence (PL) to perform high-speed, high-sensitivity automatic inspection for crystal defects, cracks, and luminescence defects which cannot be detected with conventional visible light surface inspection!

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Surface Profiler Measurement System

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Measuring & Analysis Equipment

Wafer Internal Inspection System

Wafer Inspection System

Luminescence Defect Inspection System