RF Match Networks

Enable fast, accurate, and reliable matching. Advanced Energy’s match networks expertly perform in multiple power ranges. Available in plug-and-play models or configurable units, easily install, expedite tuning, and tighten process control.

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Plasma Power Generators

Advanced Energy

Advanced Energy’s field-proven, Precision PowerTM solutions offer extreme control, peerless arc handling, and cutting-edge match technology. Unlock new fabrication processes and benefit from our plasma power generators’ comprehensive capabilities.

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DC Power Source Systems

Advanced Energy

Looking for a proven, precise DC power source? Advanced Energy offers standard DC and pulsed-DC power-delivery options. Thanks to vast feature sets and reliable performance, our DC power generators are used in nearly every manufacturing market — semiconductor, flat panel, glass, thin film, etc. And via our global, dedicated support staff, we make sure you get the right DC power product for your processes and applications.

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Low/Mid-Frequency Power Systems

Advanced Energy

Advanced Energy’s low- and mid-frequency power supplies offer highly efficient, easy-to-integrate power. Quickly improve process control in a wide variety of applications.

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RF Plasma Generators

Advanced Energy

Choose from a broad range of RF plasma generators and access unique features for configuration, control, and application requirements. From various mounts and sizes to full digital control and plasma dynamic response, our RF generators can ignite your process innovation.

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Pulsed-DC Systems

Advanced Energy

Extend process innovation with Advanced Energy’s comprehensive pulsed-DC suite. Minimize arcing, enhance deposition rate, improve film flatness and packing density.

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Digitally-Tuned Matching

Navigator II - Advanced Energy

The Navigator® ll is equipped with microprocessor-controlled, stepper-motor drives, and advanced tuning algorithms — enabling optimized RF power. An optional internal Z’Scan® II RF sensor provides real-time analysis of process power and impedance — allowing you to quickly identify and significantly reduce process variability. Optional Virtual Front Panel software is available for monitoring and control through a user’s computer.

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Power Delivery

Navigator II FCi - Advanced Energy

The Navigator® II FCi is a standalone, microprocessor-controlled impedance matching network. Incorporating tuning elements adjusted by discrete solid-state switched capacitor arrays, the matching network is driven by the need to achieve fast, accurate tuning across wider impedances. With a similar form, footprint, and tuning ranges as traditional counterparts, these matches offer tuning times in the millisecond range compared with the one-second range typical of traditional matching networks. This high-speed matching technology is optimized and suited for critical, power sensitive, short duration plasma process steps such as Atomic Layer Etch (ALE).

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Matching Network Solution

Navio - Advanced Energy

Experience simplicity and high reliability in a single, affordable package. The Navio™ matching network leverages our power expertise to precisely match complex plasma impedance to your tuning range. It’s quick, accurate, and repeatable. Available in multiple power ranges and frequencies, choose from a standard offering or a configurable design. Installation is virtually plug-and-play with Advanced Energy’s RF power supplies. Virtual Front Panel software is available for monitoring.

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