Differential Interferometer

The Keysight 10715A Differential Interferometer performs differential measurements between the supplied reference mirror and a measurement plane mirror. It provides exceptional long term stability. The 10715A minimizes dead path, and, because the entire optical path through the interferometer is common mode, it eliminates thermal drift in measurements. The resolution of the measurement is twice that of a linear or single-beam interferometer.

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Differential and Compensation Interferometers

Keysight Technologies

One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.

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One Axis Differential Interferometer

10719A - Keysight Technologies

The Keysight 10719A One Axis Differential Interferometer makes either a differential linear or angular measurement for use in single and multiple axis applications. The linear measurement gauges the displacement between two objects, such as a stage and an optical column or inspection tool. The 10719A also measures either pitch or roll. An angle is measured when both reference and measurement beams measure to the same mirror. The 10721A provides high immunity to unwanted interferometer displacement, such as thermal expansion. It is a modular, compact design with monolithic optics for maximized mechanical stability. Use of a small 3 mm beam helps decrease Abb offset error.

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Wavelength Tracker

10717A - Keysight Technologies

The Keysight 10717A Wavelength Tracker tracks changes in the air's index of refraction to optically compensate for environmental changes. It uses one axis of a laser measurement system to report wavelength of light changes, not changes in position. It is used to correct displacement values reported by other measurement axes in the system, hence improving measurement accuracy. It provides a higher degree of accuracy than environmental sensors such as the 10751C and 10751D Air Sensors.

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Differential Interferometer

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Differential and Compensation Interferometers

One Axis Differential Interferometer

Wavelength Tracker