CSR Cal Substrates

Cascade Microtech, Inc. (FormFactor)

All CSR calibration substrates include the Open standard on the substrate itself, providing a more accurate calibration when compared to simply lifting the probes for Open. Since our probe systems are used in the laser-trimming process, the typical accuracy is better than 0.1% for all Load standards. Also, the resistance of the Load standard remains stable within 0.3% of the ideal value (50 ?), over a temperature range from 10 to 430 K.