Tri-Axial Vibration Test Tool

AMHS and conveyor manufacturers utilize the Tri-Axial Vibration Test Tool to quantify and qualify the vibration characteristics during development, installation and maintenance of their systems. This industry-standard tool is used by 200mm and 300mm FABs to measure the vibration induced to wafer lots by their material handling systems. By detecting the early signs of track misalignment, systems can be maintained to minimize the vibration induced on the wafer lots.

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Topics

Vibration Test
Vibration
Test
Handling Systems
System Test
Test Systems
Test Development
Systems
Wafer
Development