PC System Electronics

Keysight PC electronics provide state of the art laser interferometer performance in the convenient PC backplane format. Axis, servo-axis and compensation boards are available.

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Laser Interferometer Position Measurement Systems

Keysight Technologies

When built into manufacturing and inspection equipment, a laser interferometer system reports the position or controls the motion of a product platform with more accuracy than any other method. It allows manufacturers to produce precision products from integrated circuits to medical devices to aerospace components that meet the most stringent specifications.

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Beam Directing and Reflecting Optics

Keysight Technologies

Beam directing and reflecting optics simply reflect, bend or translate the beam, but do not typically modify the polarization, except for polarizing beam splitters. For example, mirrors, cube corners and retroreflectors are attached to objects that move in order to keep the weight down on the moving object (instead of mounting the interferometer on the moving object).

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2-Axis High-Resolution Laser Axis Board for VME

10898D - Keysight Technologies

The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.

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Single Axis Interferometers

Keysight Technologies

Linear, single-beam, and plane mirror interferometers measure motion on a single axis.

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Differential and Compensation Interferometers

Keysight Technologies

One- and two-axis differential interferometers measure relative displacement between two objects. The wavelength tracker automatically compensates for environmental changes.

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Laser Heads

Keysight Technologies

The laser head is the source of the laser beam used in all laser motion and position measurement systems. The primary difference between laser heads is in the velocity, reference frequency and optical output power. Other considerations are size, heat dissipation, and input power requirements. Which laser you choose depends primarily on the application in which it will be used. For example, semiconductor lithography systems typically have faster moving parts (stages), and therefore need higher velocities than machine tool applications.

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Multiple Axis Interferometers

Keysight Technologies

Interferometers that measure two and three axes can increase accuracy, reduce alignment time and save space in high performance multi-axis systems.

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Receivers and Sensors

Keysight Technologies

Choose the optical receiver that meets your system performance and layout requirements. Add sensors for automatic compensation for environmental changes.

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VME System Electronics

Keysight Technologies

Keysight VME electronics give the highest performance available in a laser interferometer system. Choose from a variety of axis and compensation boards.

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PCI Three-Axis High Performance Laser Board with External Sampling

N1231B - Keysight Technologies

The Keysight N1231B PCI Three-Axis Laser Board with External Sampling is a register based PCI bus board that implements three axes of laser interferometer measurement for position monitoring and closed-loop servo control. There are four external sample inputs along with four data hold inputs that allow easy synchronization with user systems. Several threshold compare registers, with both hardware outputs and interrupt capability, can be used for travel limit and in window or out of window detection functions. The dual mode hardware position outputs, controlled by the hold inputs, provide either a 32-bits/axis parallel interface or a 36-bit multiplexed interface to the 36-bit axis position data at rates up to 20MHz. The user can programmatically access the externally sampled position and velocity data, as well as software sampled position and velocity data, over the PCI bus at rates up to 100kHz (3 axes of position and velocity) or 200kHz (position or velocity only).

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PCI Three-Axis Laser Board

N1231A - Keysight Technologies

The Keysight N1231A PCI Three-Axis Laser Board is a register based PCI bus board that implements three axes of laser measurement for position monitoring and closed-loop servo control. The hardware outputs, optimized for connection to a DeltaTau PMAC servo control system, provide parallel digital position data at rates up to 4MHz. The same position data along with velocity data is available over the PCI bus at rates up to 100kHz (3 axes of position and velocity) or 200kHz (position or velocity only).

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