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  • Spectroscopic Reflectometer

    Nano-View Co. Ltd.

    – Antireflective coating (ARC) on textured (poly-) crystalline silicon solar cellMeasurement– Thickness, Reflectivity, n&kWavelength– 420 – 950 nm (1.3-3.0 eV) : expandableAccuracy (thickness measurement on specular sample)– 104.5 nm for 104.8 nm SiO₂on c-Si* Accuracy can be dependent on the quality of filmThickness range– 10 nm ~ 20 mm (depend on sample)Data acquisition time– < 1 sBeam spot size– ~ 50 mmFocusing of beam– Manual (optional auto-focus)Sample stage– Manual X-Y stage (specify sample size and travel distance)(optional automatic X-Y stage for mapping)

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