Single Wafer Transfer
Recif Technologies Inc. (Recif)
The SPPE is the next generation of the RECIF/EMU SPP range, which has been installed at wafer fabs across the world since the late 1990's. Cassettes are mapped for wafer presence, cross or double slot detection and wafer safety sensors are active throughout the loading and transfer process.
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Batch ID Reader
IDWR200 - Recif Technologies Inc.