Wafer AOI
MX2000IR - Viscom AG
*Infrared illumination - transmitted light and reflected light.
*Higher throughput.
*Non-destructive inspection of the wafer''s surface and interior.
*Automated reading of wafer identification and pre-alignment parallel to inspection.
*Direct identification of each wafer by code reading (barcode, data matrix code, OCR).
*Automatic loading and unloading.