TMAH/H2O2 Monitor

TMAH/H2O2 Monitor

The CS-139E is a high-precision chemical concentration monitor designed for use with TMAH/H2O2 solutions used in cleaning processes during semiconductor manufacturing. It offers a faster response speed and a more compact size than anything available to date, and monitors the concentrations of the various components of the SC-1 solutions (TMAH/H2O2/H2O) are used as substitutes for SC-1 on an ongoing basis. Feedback control based on the monitor output is used to keep the concentrations of the TMAH/H2O2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. In addition, a model with an integrated cooling unit is available, allowing accommodation of a broad range of sample temperatures.