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5D Patterning Control Solution™

5D Patterning Control Solution™

5D Analyzer® is a run-time process control solution with supporting analytics and visualization for ≤7nm node patterning, and is a key component in KLA-Tencor’s comprehensive 5D Patterning Control Solution™. It accepts a wide range of metrology and process tool data, including overlay, reticle registration, wafer geometry, chamber temperature, films, critical dimension, and device profile metrology systems.

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