Position Control Interface Software
PositionCommander - Pacific Western Systems, Inc. (PWS)
Position Control Interface Software. #
inear-Motion Directional Commands ? These controls move the wafer in linear directions a specified distance: step moves the wafer in the largest increments, and pulse in the smallest.
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Theta Controls ? These commands move wafers clockwise or counter clockwise using step, jog, or pulse movements.
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Z-Controls - PositionCommander can also be used to move the wafer up or down.