PL Mapping Tool

RPMBlue-FS - Nanometrics Incorporated

The RPMBlue-FS is a photoluminescence mapping tool that can be fitted with a robotic wafer handler if needed. This tool has a very flexible configuration with a full specification spectrometer that can cover wavelengths from the deep UV to 2 microns or more. With room to fit up to four laser excitation sources and two array detectors while handling wafer sizes from 2" to 6", this high-speed room temperature PL mapper can meet the needs of almost all compound semiconductor users.