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Electrodeless Z-Pinch™20 watt EUV Source

Electrodeless Z-Pinch™20 watt EUV Source

The EQ-10HP is a compact, easy-to-use, reliable, and cost-effectiveEUV light source, based on Energetiq's proven Electrodeless Z-pinch™technology using Xenon gas. The EQ-10 EUV source is uniquely suited for metrology and research applications.

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