Vaporizers

Vaporizers

Vaporizers are used in gas phase processes to transition a liquid into a gas for thin film deposition or other processes that require a vapor (metal etch, doped epitaxial growth, etc). Vaporizers are widely used in:

*CVD (Chemical Vapor Deposition)
*PECVD (Plasma-Enhanced Chemical Vapor Deposition)
*MOCVD (Metal-Organic Chemical Vapor Deposition)
*ALD (Atomic Layer Deposition)

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