Showing results: 1 - 5 of 5 items found.
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THOR -
Unity Semiconductor SAS
• Water edge defectivity and EBR measurements• Available at all edge zones in one scan• Ideal companion to upgrade Wotan• High speed• High sensitivity
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LIGHTiX -
Unity Semiconductor SAS
Next generation macro inspection system (AOI).• All-side wafer inspection: Front, back and edge inspection.• 100% defect images without throughput impact.• Integrated high-end microscope review.• True Color Inspection (TCI) technology.• Advanced CD, 2D/3D, OVL and EBR metrology.• Automatic defect classification• Best in class cost of ownership for high resolution AOI• High-speed patterned wafer inspection• High defect sensitivity• ISO Class 1 certified• Tool – to – tool matching
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LIGHTnPS -
Unity Semiconductor SAS
• Best in class throughput• High surface sentivity• Full haze characterization• High lifetime / low CoO solid state laser• Advanced Automatic Defect Classification
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LIGHTsPEED -
Unity Semiconductor SAS
High throughput• Nanometer scale sensitivity• Autofocus• Full haze characterization• Multisize capability• Pits / Particle distinction• High lifetime / low CoO solid state laser• Advanced Automatic Defect Classification
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LIGHTsEE -
Unity Semiconductor SAS
High throughputNanometer range vertical sensitivitySimultaneous double side inspectionNanotopography and Topography measurementDetection of Slip lines, particles, Hairline cracks, SOI voids, Comets, EPI defects…Compliant with thin or thick wafers, taiko wafers, highly warped wafers