WetSpec100 - In-Line Process Analyzer
CI Semi?s WetSpec100 is a cost effective non-contact in-line monitor of chemical composition of liquids. It can be integrated into applications such as health monitoring of slurries in CMP blending and distribution systems, and monitoring of cleaning, stripping, and other liquids in wet stations. The system accurately measures the absorption spectrum in the near infrared (NIR) to monitor the chemical composition and other physical properties of liquids.
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CI-Semi
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