WaferSense ATS - Precision Machine Vision Teaching
WaferSense ATS, wireless and wafer-like, moves through semiconductor equipment just as a wafer to capture offset data (x, y, z) for accurate calibration of transfer positions. The teaching wafer is vacuum compatible so measurements can be taken while the equipment is sealed, saving qualification time and consumables.
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Cyberoptics Semiconductor, Inc.
13555 SW Millikan Way
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