VisEdge CV300 Wafer Edge Inspection System
Representing the semiconductor industry?s first inspection solution capable of meeting the full range of wafer-edge inspection requirements in a production environment, the VisEdge CV300 system leverages KLA-Tencor?s proven Optical Surface Analyzer (OSA) technology. Many advanced IC manufacturers are facing an average of 10 to 50 percent greater yield loss at the wafer?s edge relative to their best yielding region and a comprehensive inspection strategy that includes advanced edge inspection has become critical. Built on a highly extendible platform, the tool?s combination of unique optics design and advanced defect classification capabilities allows IC manufacturers to overcome the limitations of existing edge inspection techniques and enable broader capture and better distinction of edge defectivity to increase yield.
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KLA-Tencor
160 Rio Robles
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