Tri-Axial Vibration Test Tool
AMHS and conveyor manufacturers utilize the Tri-Axial Vibration Test Tool to quantify and qualify the vibration characteristics during development, installation and maintenance of their systems. This industry-standard tool is used by 200mm and 300mm FABs to measure the vibration induced to wafer lots by their material handling systems. By detecting the early signs of track misalignment, systems can be maintained to minimize the vibration induced on the wafer lots. The Tri-Axial Vibration Test Tool can be used as a stand-alone unit or with the GCI Information Center to provide automated recording using RFID technology.
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Get Control, Inc.
1530 North Hobson Street, Suite 101
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