TeraScan Deep Ultraviolet (DUV) Reticle Inspection
The TeraScan reticle inspection system provides powerful technology and productivity features that enable maximum yields from today's complex low k1 reticles. Using a new DUV image acquisition system with proven Tera? family inspection algorithms, TeraScan provides a higher sensitivity inspection than previous generations and the industry's lowest cost-of-ownership. It is the first reticle inspection system incorporating phase contrast to detect quartz defects for a thorough production inspection of advanced alternating phase shift reticles.
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KLA-Tencor
160 Rio Robles
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