SU-70 Analytical UHR Schottky Emission Scanning Electron Microscope

Model SU-70 is a new concept SEM incorporating field proven Hitachi’s semi-in-lens technology for ultra high resolution, and Schottky electron gun. It features not only ultra high resolution (1.0 nm/15kV, 1.6nm*/1 kV), but also observation of charge-up reduced image, compositional contrast image, ultra-low accelerating voltage image*, benefiting from highly-reputed Super ExB function.

Hitachi High-Technologies

1-24-14 Nishi Shimbashi
Minato-ku
Tokyo, 105-8717
JAPAN



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