S-4800 Ultra-high Resolution Scanning Electron Microscope (SEM)
In spite of semi-in-lens SEM, in-lens SEM equivalent specification has been realized. Observation for standard 6inch or maximum 8inch (Option) wafer. Wider non-destructive observation. Image observation for various purposes is performed by the super ExB that is selectable information switch for signals from one detector. Ultra low acceleration voltage observation from 100V by retarding function (Option).
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Hitachi High-Technologies
1-24-14 Nishi Shimbashi
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