RAPID THERMAL PROCESSING
Photon Dynamics is a leading supplier of rapid thermal processing (RTP) equipment for the flat panel display industry, and in particular, for the fast emerging technology of low-temperature poly-silicon (LTPS). Low temperature poly-silicon is made from amorphous silicon deposited onto glass substates. The amorphous silicon is crystallized using lasers, then processed into transistors in much the same way as is done for integrated circuits (IC's). However, while a silicon wafer can be processed at 1000°C, glass can only be processed at about 600°C before it begins to shrink, warp, or break. The challenge is to heat the poly-silicon film as hot and as uniformly as possible while keeping the glass below its maximum temperature. Photon Dynamics RTP technology addresses this challenge while also enabling faster and more cost-effective processing of glass.
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Photon Dynamics
17 Great Oaks Blvd.
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