Plus Portal XT
Asyst's Plus Portal XT is a complete automated equipment front-end (AFE) system for 300mm fab production and advanced 200mm factory automation systems. As part of Asyst's modular family, the Plus Portal incorporates a unique design approach and the latest robotics and front-load technology to deliver cost-effective, enhanced productivity and ease-of-integration with equipment manufacturer's semiconductor process, metrology and inspection tools. "XT" is built around a unibody frame that has been designed for ease-of-service and manufacture, as well as high performance. It utilizes state-of-the-art, ultra-clean factory automation components for high reliability and easy integration and alignment.
|
Asyst Technologies, Inc.
48761 Kato Road
|
