Nanopositioning Stages (Piezo Motors)
The piezo motor combines the ability to achieve resolutions below 50nm, with absolute position stability, and maximum speeds to 200mm per second all with long travel lengths. The piezo motor and encoder are also used to provide precision rotary motion, in a small rotary stage, with direct feedback, ranging to sub-arc second resolution.
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Compumotor Division of Parker Hanni
5500 Business Park Dr.
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