NEXIV FOUP - CNC Video Measuring System

Provides all dimensional measurements required for wafer carrier fabrication including control of deformation due to aging of wafer carriers. The NEXIV VMR-C4540 - designed for use with 300mm Front Opening Unified Pod (FOUP) & Front Opening Shipping Box (FOSB) wafer carriers - detects hard to see edges using a variety of illumination features as well as Nikon's unique image processing technologies.\

Nikon Instruments Inc.

1300 Walt Whitman Road
Melville, NY 11747-3064
USA



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