IS3000 Dark Field Wafer Defect Inspection System
Dark field wafer inspection system for 45 nm generation
Effective for yield enhancement by the high sensitivity / high speed inspection capabilities. Superior cost effective inspection tool. DFC (Dark field real time classification)
Recipe set up in minutes. Precise coordinate system for SEM review.
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Hitachi High-Technologies
1-24-14 Nishi Shimbashi
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