E84 SPC - Serial to Parallel Controller
300mm equipment manufacturers utilize this off-the-shelf E84 communications controller to provide SEMI E84 compliant communications for their products. With its built-in Load and Unload algorithms it is the perfect E84 communications solution for process tools, stockers, load ports, FOUP buffers, smart storage shelves and simulation load ports. The E84 SPC easily integrates with equipment controllers through a standard serial communications connection. All handshaking functions are performed automatically with error detection and reporting, requiring only a minimal amount of communications overhead with the equipment controller
|
Get Control, Inc.
1530 North Hobson Street, Suite 101
|
