Candela 5100 - Optical Surface Analyzer (OSA)
The Candela 5100 system combines five independent detection methods: scatterometry, reflectometry, ellipsometry, optical profilometry, and Kerr effect microscopy in a compact, cost-effective system. Its measurements are well-suited for a variety of production monitoring, process development, and surface analysis applications. The OSA system scans the entire disk surface with a spiral motion, and the measurement data is displayed as a highly detailed image map.
|
KLA-Tencor
160 Rio Robles
|
