Automatic Loader
Comet loader activity is less contaminating to the wafers than human operators, is increasing the productivity, and reducing the risk of scratches due to operator handling.
The advantages of the Comet loaders are also the computer production control and the need for only one loading mechanism per furnace stack.
When it is time for the wafers into the cassette to be loaded in the tube, a Comet robot selects the proper wafers from cassettes, transfers them to the correct boat moves them to the correct tube position loads them into the tube.
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R2D Ingenierie
11782 Jollyville Rd.
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