Auger Electron Spectroscopy
This surface analytical technique, which is similar to SEM/EDX, provides the concentration and distribution of the major elements, except H and He, on conductive surfaces. As in SEM/EDX , a focused beam of electrons (1 to 25 KeV in energy) excites atoms on a solid surface by generating core holes, but instead of x-rays, the detected particles are electrons emitted when the excited atoms relax by a two electron "Auger" process. When combined with an ion beam for sputter etching, AES can also provide in depth concentration profiles of the major elements.
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IBM Analytical Services
1580 Route 52
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